Invention Grant
US07946800B2 Substrate transport apparatus with multiple independently movable articulated arms 有权
具有多个可独立移动的铰接臂的基板输送装置

Substrate transport apparatus with multiple independently movable articulated arms
Abstract:
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.
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