Invention Grant
- Patent Title: Gate effective-workfunction modification for CMOS
- Patent Title (中): CMOS有效功能修改功能
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Application No.: US12037158Application Date: 2008-02-26
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Publication No.: US07947549B2Publication Date: 2011-05-24
- Inventor: Dae-Gyu Park , Michael P Chudzik , Rashmi Jha , Siddarth A Krishnan , Naim Moumen , Vijay Narayanan , Vamsi Paruchuri
- Applicant: Dae-Gyu Park , Michael P Chudzik , Rashmi Jha , Siddarth A Krishnan , Naim Moumen , Vijay Narayanan , Vamsi Paruchuri
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent George Sai-Halasz; Louis J. Percello
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
CMOS circuit structures are disclosed with the PFET and NFET devices having high-k dielectric layers consisting of the same gate insulator material, and metal gate layers consisting of the same gate metal material. The PFET device has a “p” interface control layer which is capable of shifting the effective-workfunction of the gate in the p-direction. In a representative embodiment of the invention the “p” interface control layer is aluminum oxide. The NFET device may have an “n” interface control layer. The materials of the “p” and “n” interface control layers are differing materials. The “p” and “n” interface control layers are positioned to the opposite sides of their corresponding high-k dielectric layers. Methods for fabricating the CMOS circuit structures with the oppositely positioned “p” and “n” interface control layers are also disclosed.
Public/Granted literature
- US20090212369A1 Gate Effective-Workfunction Modification for CMOS Public/Granted day:2009-08-27
Information query
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