Invention Grant
- Patent Title: Apparatus and method for semiconductor bonding
- Patent Title (中): 用于半导体结合的装置和方法
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Application No.: US11766531Application Date: 2007-06-21
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Publication No.: US07948034B2Publication Date: 2011-05-24
- Inventor: Gregory George , Etienne Hancock , Robert Campbell
- Applicant: Gregory George , Etienne Hancock , Robert Campbell
- Applicant Address: DE Garching
- Assignee: Suss Microtec Lithography, GmbH
- Current Assignee: Suss Microtec Lithography, GmbH
- Current Assignee Address: DE Garching
- Agency: AKC Patents LLC
- Agent Aliki K. Collins
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
An apparatus for bonding semiconductor structures includes equipment for positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure and equipment for forming a bond interface area between the first surfaces of the first and second semiconductor structures by pressing the first and second semiconductor structures together with a force column configured to apply uniform pressure to the entire bond interface area between the first surfaces.
Public/Granted literature
- US20070296035A1 APPARATUS AND METHOD FOR SEMICONDUCTOR BONDING Public/Granted day:2007-12-27
Information query
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