Invention Grant
US07948063B2 Semiconductor device with stress control film utilizing film thickness 失效
具有应力控制薄膜的半导体器件利用薄膜厚度

Semiconductor device with stress control film utilizing film thickness
Abstract:
Semiconductor devices required forming a stress control film to handle different stresses on each side when optimizing the stress on the respective P channel and N channel sections. A unique feature of the semiconductor device of this invention is that P and N channel stress are respectively optimized by making use of a stress control film jointly for the P and N channels that conveys stress in different directions by utilizing the film thickness.
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