Invention Grant
US07948063B2 Semiconductor device with stress control film utilizing film thickness
失效
具有应力控制薄膜的半导体器件利用薄膜厚度
- Patent Title: Semiconductor device with stress control film utilizing film thickness
- Patent Title (中): 具有应力控制薄膜的半导体器件利用薄膜厚度
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Application No.: US12320186Application Date: 2009-01-21
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Publication No.: US07948063B2Publication Date: 2011-05-24
- Inventor: Hitoshi Mitani
- Applicant: Hitoshi Mitani
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2008-038768 20080220
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L27/092 ; H01L21/70

Abstract:
Semiconductor devices required forming a stress control film to handle different stresses on each side when optimizing the stress on the respective P channel and N channel sections. A unique feature of the semiconductor device of this invention is that P and N channel stress are respectively optimized by making use of a stress control film jointly for the P and N channels that conveys stress in different directions by utilizing the film thickness.
Public/Granted literature
- US20090206410A1 Semiconductor device and method for manufacturing the same Public/Granted day:2009-08-20
Information query
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