A measurement apparatus that detects a defect in a device based on the quiescent current (IDDQ) of a CMOS LSI or the like detects the defect by measuring the value of IDDQ that flows when a logic vector is applied. However, the miniaturization of CMOS LSIs has caused an increase in the leak current flowing through a normal CMOS circuit. This makes it difficult to distinguish between the power supply current flowing in a defective CMOS circuit and the leak current flowing through a normal CMOS circuit. By applying the logic vector after suppressing the fluctuation of the leak current by controlling the power supply voltage applied to the device under measurement and the voltage applied to the substrate of the device under measurement, the measurement apparatus of the present invention can measure the power supply current flowing through a defective CMOS circuit to detect the defect in the CMOS circuit.