Invention Grant
US07948606B2 Moving beam with respect to diffractive optics in order to reduce interference patterns
有权
相对于衍射光学器件移动光束,以减少干涉图案
- Patent Title: Moving beam with respect to diffractive optics in order to reduce interference patterns
- Patent Title (中): 相对于衍射光学器件移动光束,以减少干涉图案
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Application No.: US11403194Application Date: 2006-04-13
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Publication No.: US07948606B2Publication Date: 2011-05-24
- Inventor: Huibert Visser , Johannes Jacobus Matheus Baselmans , Pieter Willem Herman De Jager , Henri Johannes Petrus Vink
- Applicant: Huibert Visser , Johannes Jacobus Matheus Baselmans , Pieter Willem Herman De Jager , Henri Johannes Petrus Vink
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03B27/42
- IPC: G03B27/42

Abstract:
A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.
Public/Granted literature
- US20070242253A1 Moving beam with respect to diffractive optics in order to reduce interference patterns Public/Granted day:2007-10-18
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