Invention Grant
US07948642B2 Optical measuring apparatus, optical measuring method, and optical measurement processing program 有权
光学测量装置,光学测量方法和光学测量处理程序

  • Patent Title: Optical measuring apparatus, optical measuring method, and optical measurement processing program
  • Patent Title (中): 光学测量装置,光学测量方法和光学测量处理程序
  • Application No.: US12759159
    Application Date: 2010-04-13
  • Publication No.: US07948642B2
    Publication Date: 2011-05-24
  • Inventor: Masanobu Kataoka
  • Applicant: Masanobu Kataoka
  • Applicant Address: JP Kawasaki
  • Assignee: Mitutoyo Corporation
  • Current Assignee: Mitutoyo Corporation
  • Current Assignee Address: JP Kawasaki
  • Agency: Rankin, Hill & Clark LLP
  • Priority: JP2009-098113 20090414
  • Main IPC: G01B11/14
  • IPC: G01B11/14
Optical measuring apparatus, optical measuring method, and optical measurement processing program
Abstract:
An optical measuring apparatus includes a light transmission unit, a light reception unit, a measurement value calculation unit, and a correction unit. The light transmission unit forms a beam of light that focuses in a measurement area where a measurement target object is placed and scans the measurement area with the beam of light. The light reception unit receives the beam of light that has passed through the measurement area and outputs a received-light signal on the basis of the received beam of light. The measurement value calculation unit calculates a measurement value that represents the dimension of the measurement target object on the basis of the received-light signal. The correction unit corrects the measurement value on the basis of the amount of change in the strength of the received-light signal per unit of time of scanning the beam of light.
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