Invention Grant
- Patent Title: Pattern transfer apparatus and pattern transfer method
- Patent Title (中): 图案转印装置和图案转印方法
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Application No.: US12398595Application Date: 2009-03-05
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Publication No.: US07948698B2Publication Date: 2011-05-24
- Inventor: Kazuhiko Takaishi , Masanori Fukushi
- Applicant: Kazuhiko Takaishi , Masanori Fukushi
- Applicant Address: JP Tokyo
- Assignee: Toshiba Storage Device Corporation
- Current Assignee: Toshiba Storage Device Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JP2008-128720 20080515
- Main IPC: G11B5/86
- IPC: G11B5/86

Abstract:
A pattern transfer apparatus includes a storage-medium-surface detecting unit that detects a foreign substance or defect on a surface of a storage medium and specifies a position and a size of the foreign substance or defect; a relative-position adjusting unit that adjusts a relative position on a contact surface between the surface of the storage medium and a transfer pattern surface of a transfer master, and a relative-position-adjustment instructing unit that calculates an adjusted value of the relative position according to a detection result, and instructs the relative-position adjusting unit to adjust the relative position based on the adjusted value.
Public/Granted literature
- US20090285073A1 PATTERN TRANSFER APPARATUS AND PATTERN TRANSFER METHOD Public/Granted day:2009-11-19
Information query
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