Invention Grant
- Patent Title: Static eliminator
- Patent Title (中): 静电消除器
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Application No.: US12323536Application Date: 2008-11-26
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Publication No.: US07948733B2Publication Date: 2011-05-24
- Inventor: Tadashi Hashimoto
- Applicant: Tadashi Hashimoto
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Smith Patent Office
- Priority: JP2007-341094 20071228
- Main IPC: H01T23/00
- IPC: H01T23/00

Abstract:
There is provided a static eliminator for accurately detecting a contamination condition of a discharge electrode, in which a target value as a target frame ground current value is changed from, for example, zero as a reference alternately to the plus side and the minus side to such a degree as not to affect the ion balance of a workpiece, and the follow-up time, namely a phase delay, with respect to the change in target value differs depending on the contamination condition of the discharge electrode, and becomes longer with the progress of the contamination, and by use of this characteristic, a plurality of thresholds are prepared and compared with a detected frame ground current value, so as to detect the contamination condition of the discharge electrode.
Public/Granted literature
- US20090168288A1 STATIC ELIMINATOR Public/Granted day:2009-07-02
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