Invention Grant
- Patent Title: Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip
- Patent Title (中): 用于自动检测和校正半导体芯片的未对准的方法和装置
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Application No.: US11437456Application Date: 2006-05-19
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Publication No.: US07949436B2Publication Date: 2011-05-24
- Inventor: Robert J. Drost , Ronald Ho , David C. Douglas
- Applicant: Robert J. Drost , Ronald Ho , David C. Douglas
- Applicant Address: US CA Redwood Shores
- Assignee: Oracle America, Inc.
- Current Assignee: Oracle America, Inc.
- Current Assignee Address: US CA Redwood Shores
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Main IPC: G05D1/02
- IPC: G05D1/02
Abstract:
One embodiment of the present invention provides a system that automatically detects and corrects a misalignment of a semiconductor chip. During operation, the system uses a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip. Next, the system uses an actuation mechanism integrated with the chip to automatically correct the misalignment, thereby improving performance and reliability of the chip.
Public/Granted literature
- US20070266557A1 Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip Public/Granted day:2007-11-22
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