Invention Grant
US07952098B2 Active matrix electronic array device 有权
有源矩阵电子阵列器件

Active matrix electronic array device
Abstract:
An active matrix device has an array (54) of device elements, each of which comprises at least one thin film transistor (34). A thin film conductive heater element arrangement (10) is provided over a substrate of the device, and the semiconductor islands of the thin film transistors are provided over the heater element arrangement (10). The heating arrangement can remain in place in the device, thereby avoiding the need to remove the layers of the heater element arrangement during processing.
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