Invention Grant
US07953129B2 Laser light source device, exposure device, and mask inspection device using this laser light source device 有权
激光光源装置,曝光装置和使用该激光光源装置的掩模检查装置

  • Patent Title: Laser light source device, exposure device, and mask inspection device using this laser light source device
  • Patent Title (中): 激光光源装置,曝光装置和使用该激光光源装置的掩模检查装置
  • Application No.: US12630590
    Application Date: 2009-12-03
  • Publication No.: US07953129B2
    Publication Date: 2011-05-31
  • Inventor: Hitoshi Kawai
  • Applicant: Hitoshi Kawai
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Morgan, Lewis & Bockius LLP
  • Priority: JP2004-063679 20040308
  • Main IPC: H01S3/10
  • IPC: H01S3/10
Laser light source device, exposure device, and mask inspection device using this laser light source device
Abstract:
A laser light source device 1, comprising M number of laser light sources, of which frequency is shifted from a fundamental frequency by (m−1)·a·Δω, a first laser light source section 2 and a first fiber amplifier section 4 for amplifying these laser lights, a first optical multiplexer 6 for approximately coaxially superimposing the laser lights emitted from the first fiber amplifier section 4 and emitting the laser lights, a first wavelength conversion device 9 for multiplying the frequency of the laser lights emitted from the first optical multiplexer 6 by A, M number of laser light sources, of which frequency is shifted from the fundamental frequency by (m−1)·b·Δω, a second laser light source section 3 and a second fiber amplifier section 5 for amplifying these laser lights, a second optical multiplexer 7 for approximately coaxially superimposing the laser lights emitted from the second fiber amplifier section 5 and emitting the laser lights, a second wavelength conversion device 10 for multiplying the frequency of the laser lights emitted from the second optical multiplexer 7 by B, and a third wavelength conversion device 11 for simultaneously receiving the laser lights emitted from the first and second wavelength conversion devices 9 and 10 and converting the laser lights into laser lights, of which frequency is (A+B) times the fundamental frequency, the laser light source device 1 being characterized in that the expression A·a+B·b=0 is satisfied.
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