A drying apparatus with a vaporized-solvent-recovery function including: a concentration-at-the-end-of-drying data memorizing device to memorize a concentration of a vaporized solvent at the end of a drying operation of an object to be dried in a processing path; a vaporized solvent; an end-of-drying judging device to judge an end of drying of the object by comparing the concentration measured by the vaporized-solvent-concentration measuring device with the concentration memorized by the concentration-at-the-end-of-drying data memorizing device; and a drying-operation controlling device to control the drying operation of the object in a processing bath and to end the drying operation in response to a judgement by the end-of-drying judging device that the concentration measured by the vaporized-solvent-concentration measuring device is equal to the concentration memorized in then concentration-at-the-end-of-drying data memorizing device.