Invention Grant
- Patent Title: Acceleration sensor incorporating a piezoelectric device
- Patent Title (中): 具有压电元件的加速度传感器
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Application No.: US12056349Application Date: 2008-03-27
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Publication No.: US07954377B2Publication Date: 2011-06-07
- Inventor: Takamitsu Higuchi , Yasuhiro Ono
- Applicant: Takamitsu Higuchi , Yasuhiro Ono
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2007-084255 20070328
- Main IPC: G01P15/09
- IPC: G01P15/09

Abstract:
An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on the vibration section, the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency, and the detection circuit detects a change in the frequency of vibration of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the vibration section extends, and outputs a signal corresponding to the acceleration based on the change in the frequency.
Public/Granted literature
- US20080236283A1 ACCELERATION SENSOR AND ELECTRONIC DEVICE Public/Granted day:2008-10-02
Information query
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