Invention Grant
- Patent Title: Quick changeover apparatus and methods for wafer handling
- Patent Title (中): 快速切换装置和晶片处理方法
-
Application No.: US11847099Application Date: 2007-08-29
-
Publication No.: US07955041B2Publication Date: 2011-06-07
- Inventor: Sonny Marquez Sagun , Rhonel Morada Penamora , Alan Simon Sernadilla
- Applicant: Sonny Marquez Sagun , Rhonel Morada Penamora , Alan Simon Sernadilla
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Yingsheng Tung; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
Quick changeover apparatus for wafer handlers capable of handling at least two sizes of wafer frames and methods of using such apparatus are disclosed.
Public/Granted literature
- US20090060690A1 QUICK CHANGEOVER APPARATUS AND METHODS FOR WAFER HANDLING Public/Granted day:2009-03-05
Information query
IPC分类:
