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US07955562B2 Chemical sensor using thin-film sensing member 有权
化学传感器采用薄膜感应元件

Chemical sensor using thin-film sensing member
Abstract:
Provided is a chemical sensor that may include a first electrode on a substrate, a sensing member covering the first electrode on the substrate, and a plurality of second electrodes on a surface of the sensing member exposing the surface of the sensing member. The chemical sensor may be configured to measure the change in electrical characteristics when a compound to be sensed is adsorbed on the sensing member. Provided also is a chemical sensor array including an array of chemical sensors.
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