Invention Grant
US07955569B2 Metal halide reactor for CVD and method 失效
用于CVD和金属卤化物反应器

  • Patent Title: Metal halide reactor for CVD and method
  • Patent Title (中): 用于CVD和金属卤化物反应器
  • Application No.: US11717244
    Application Date: 2007-03-14
  • Publication No.: US07955569B2
    Publication Date: 2011-06-07
  • Inventor: Hubert Patrovsky
  • Applicant: Hubert Patrovsky
  • Main IPC: B01J8/02
  • IPC: B01J8/02 C01B9/00
Metal halide reactor for CVD and method
Abstract:
A reaction vessel (reactor) is shown that, filled with metal and placed either within a CVD type furnace or in a housing in fluid communication with the CVD type furnace can produce commercial quantities of a metal halide gas over extended time periods and multiple furnace runs. The control of temperature and the simplicity of this reaction vessel allows temperature differentials between the metal halide gas produced and the CVD type reactor target thus providing differing deposits. The reactor is noteworthy in that no valves, flow restrictors or other equipment which could create corrosion problems is used in the heated/reactive area of the vessel thus producing very high quality metal halide gas.
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