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US07955691B2 Hard amorphous carbon film 有权
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Hard amorphous carbon film
Abstract:
An amorphous hard carbon film comprising a first amorphous carbon layer substantially consists only of carbon formed on a substrate surface and a second amorphous carbon layer substantially consists only of carbon formed on the surface of the first amorphous carbon layer, wherein the transmission electron microscope image of the first amorphous carbon layer is brighter than that of the second amorphous carbon layer when the cross section is observed.
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