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US07955722B2 Protective alumina film and production method thereof 有权
保护性氧化铝薄膜及其制备方法

Protective alumina film and production method thereof
Abstract:
Provided is a protective alumina film mainly containing alumina in the α-crystal structure and fine crystal grains in which one or more regions containing additionally an element other than aluminum formed along the planes in the direction almost perpendicular to the thickness direction of the protective film are present intermittently in the thickness direction inside the protective film.
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