Invention Grant
- Patent Title: Method of correcting defect in photomask
- Patent Title (中): 校正光掩模缺陷的方法
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Application No.: US12163213Application Date: 2008-06-27
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Publication No.: US07955760B2Publication Date: 2011-06-07
- Inventor: Tae Joong Ha , Hee Chun Kim
- Applicant: Tae Joong Ha , Hee Chun Kim
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2007-0103486 20071015
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03C5/00

Abstract:
Disclosed herein is a method of correcting defects in photomasks. According to one embodiment, a light absorption layer is formed on a photomask where pin hole defects occur in a light blocking layer, and light absorption patterns are formed on the pin hole defect portions by selectively etching the light absorption layer. According to another embodiment, a light absorption layer is formed on a backside of a photomask having pin hole defects in a light blocking layer, and light absorption patterns are formed on the backside of the photomask substrate corresponding to a region having pin hole defects by etching the light absorption layer.
Public/Granted literature
- US20090098470A1 Method of Correcting Defect in Photomask Public/Granted day:2009-04-16
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