Invention Grant
- Patent Title: Method of producing semiconductor optical device
- Patent Title (中): 制造半导体光学器件的方法
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Application No.: US12481870Application Date: 2009-06-10
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Publication No.: US07955880B2Publication Date: 2011-06-07
- Inventor: Toshio Nomaguchi , Tetsuya Hattori , Kazunori Fujimoto
- Applicant: Toshio Nomaguchi , Tetsuya Hattori , Kazunori Fujimoto
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2008-162219 20080620
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of producing a semiconductor optical device includes a first step of growing a stacked semiconductor layer including a first III-V group compound semiconductor layer for an active layer on a substrate; a second step of forming a silicon oxide film on the stacked semiconductor layer, the silicon oxide film having a predetermined film stress and a predetermined thickness; a third step of forming a strip-shaped groove in the silicon oxide film by etching the silicon oxide film, using a resist pattern formed on the silicon oxide film, until a surface of the stacked semiconductor layer is exposed; and a fourth step of growing a second III-V group compound semiconductor layer in the groove using the silicon oxide film as a selective mask.
Public/Granted literature
- US20090317929A1 METHOD OF PRODUCING SEMICONDUCTOR OPTICAL DEVICE Public/Granted day:2009-12-24
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