Invention Grant
- Patent Title: Method of fabricating image sensor having reduced dark current
- Patent Title (中): 制造具有降低的暗电流的图像传感器的方法
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Application No.: US12231101Application Date: 2008-08-29
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Publication No.: US07955888B2Publication Date: 2011-06-07
- Inventor: Hyoun-Min Beak , Tae-Seok Oh , Jong-Won Choi , Su-Young Oh
- Applicant: Hyoun-Min Beak , Tae-Seok Oh , Jong-Won Choi , Su-Young Oh
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agent Monica H. Choi
- Priority: KR10-2007-0087905 20070830
- Main IPC: H01L31/10
- IPC: H01L31/10

Abstract:
An image sensor includes a light receiving device, a field effect transistor, a stress layer pattern, and a surface passivation material. The light receiving device is formed in a first region of a substrate. The field effect transistor is formed in a second region of the substrate. The stress layer pattern is formed over the field effect transistor for creating stress therein to improve transistor performance. The surface passivation material is formed on the first region of the substrate for passivating dangling bonds at the surface of the light receiving device.
Public/Granted literature
- US20090057735A1 Image sensor having reduced dark current Public/Granted day:2009-03-05
Information query
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