Invention Grant
- Patent Title: Methods and systems for thermal-based laser processing a multi-material device
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Application No.: US11643023Application Date: 2006-12-20
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Publication No.: US07955905B2Publication Date: 2011-06-07
- Inventor: James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
- Applicant: James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B23K26/00 ; B23K26/08 ; B23K26/36
Abstract:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
Public/Granted literature
- US20070215820A1 Methods and systems for thermal-based laser processing a multi-material device Public/Granted day:2007-09-20
Information query
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