Invention Grant
- Patent Title: Semiconductor device and method of forming a 3D inductor from prefabricated pillar frame
- Patent Title (中): 半导体器件和从预制柱架形成3D电感器的方法
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Application No.: US12467908Application Date: 2009-05-18
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Publication No.: US07955942B2Publication Date: 2011-06-07
- Inventor: Reza A. Pagaila , Yaojian Lin
- Applicant: Reza A. Pagaila , Yaojian Lin
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group
- Agent Robert D. Atkins
- Main IPC: H01F27/06
- IPC: H01F27/06 ; H01F27/30 ; H01L21/12 ; H01F5/00 ; H01L25/10

Abstract:
A semiconductor device is made by mounting a semiconductor die over a carrier. A ferromagnetic inductor core is formed over the carrier. A prefabricated pillar frame is formed over the carrier, semiconductor die, and inductor core. An encapsulant is deposited over the semiconductor die and inductor core. A portion of the pillar frame is removed. A remaining portion of the pillar frame provides an interconnect pillar and inductor pillars around the inductor core. A first interconnect structure is formed over a first surface of the encapsulant. The carrier is removed. A second interconnect structure is formed over a second surface of the encapsulant. The first and second interconnect structures are electrically connected to the inductor pillars to form one or more 3D inductors. In another embodiment, a shielding layer is formed over the semiconductor die. A capacitor or resistor is formed within the first or second interconnect structures.
Public/Granted literature
- US20100289126A1 Semiconductor Device and Method of Forming a 3D Inductor from Prefabricated Pillar Frame Public/Granted day:2010-11-18
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