Invention Grant
US07955958B2 Method for fabrication of polycrystalline diodes for resistive memories
有权
制造用于电阻存储器的多晶二极管的方法
- Patent Title: Method for fabrication of polycrystalline diodes for resistive memories
- Patent Title (中): 制造用于电阻存储器的多晶二极管的方法
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Application No.: US12027675Application Date: 2008-02-07
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Publication No.: US07955958B2Publication Date: 2011-06-07
- Inventor: Bipin Rajendran , Thomas Happ , Hsiang-Lan Lung , Min Yang
- Applicant: Bipin Rajendran , Thomas Happ , Hsiang-Lan Lung , Min Yang
- Applicant Address: US NY Armonk DE Munich TW Hsinchu
- Assignee: International Business Machines Corporation,Qimonda AG,Macronix International Co., Ltd.
- Current Assignee: International Business Machines Corporation,Qimonda AG,Macronix International Co., Ltd.
- Current Assignee Address: US NY Armonk DE Munich TW Hsinchu
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
The present invention, in one embodiment, provides a method of producing a PN junction the method including at least the steps of providing a Si-containing substrate; forming an insulating layer on the Si-containing substrate; forming a via through the insulating layer to expose at least a portion of the Si-containing substrate; forming a seed layer of the exposed portion of the Si containing substrate; forming amorphous Si on at least the seed layer; converting at least a portion of the amorphous Si to provide crystalline Si; and forming a first dopant region abutting a second dopant region in the crystalline Si.
Public/Granted literature
- US20090200534A1 METHOD FOR FABRICATION OF POLYCRYSTALLINE DIODES FOR RESISTIVE MEMORIES Public/Granted day:2009-08-13
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