Invention Grant
- Patent Title: Method of growing electrical conductors
- Patent Title (中): 生长电导体的方法
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Application No.: US12039689Application Date: 2008-02-28
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Publication No.: US07955979B2Publication Date: 2011-06-07
- Inventor: Juhana Kostamo , Pekka J. Soininen , Kai-Erik Elers , Suvi Haukka
- Applicant: Juhana Kostamo , Pekka J. Soininen , Kai-Erik Elers , Suvi Haukka
- Applicant Address: NL
- Assignee: ASM International N.V.
- Current Assignee: ASM International N.V.
- Current Assignee Address: NL
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: FI20001163 20000515
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/44 ; H01L21/8238
Abstract:
A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby forming a seed layer. In one arrangement, the reducing agent comprises one or more organic compounds that contain at least one functional group selected from the group consisting of —OH, —CHO, and —COOH. In another arrangement, the reducing agent comprises an electric current.
Public/Granted literature
- US20080146042A1 METHOD OF GROWING ELECTRICAL CONDUCTORS Public/Granted day:2008-06-19
Information query
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