Invention Grant
- Patent Title: Polymerizable sulfonic acid onium salt and resin
- Patent Title (中): 可聚合的磺酸鎓盐和树脂
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Application No.: US12514168Application Date: 2007-11-09
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Publication No.: US07956142B2Publication Date: 2011-06-07
- Inventor: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- Applicant: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- Applicant Address: JP Tokyo JP Yamaguchi
- Assignee: JSR Corporation,Central Glass Co., Ltd.
- Current Assignee: JSR Corporation,Central Glass Co., Ltd.
- Current Assignee Address: JP Tokyo JP Yamaguchi
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2006-305842 20061110
- International Application: PCT/JP2007/071849 WO 20071109
- International Announcement: WO2008/056795 WO 20080515
- Main IPC: C08F128/02
- IPC: C08F128/02
Abstract:
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
Public/Granted literature
- US20100063232A1 POLYMERIZABLE SULFONIC ACID ONIUM SALT AND RESIN Public/Granted day:2010-03-11
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