Invention Grant
- Patent Title: Hermetically packaged MEMS G-switch
- Patent Title (中): 封装MEMS G开关
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Application No.: US12069001Application Date: 2008-01-16
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Publication No.: US07956302B1Publication Date: 2011-06-07
- Inventor: Daniel Jean , Ezra Chen
- Applicant: Daniel Jean , Ezra Chen
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agent Fredric J. Zimmerman
- Main IPC: H01H35/02
- IPC: H01H35/02 ; H01H35/14 ; G01P15/135

Abstract:
A hermetically packaged G-switch includes a MEMS structure having a bottom substrate layer, a top device layer and an intermediate oxide layer. A mass disposed in the top device layer is connected to one, two or three anchor portions using spring arms. One end of a spring arm is connected to the mass and another end to an anchor portion. The connection to the anchor portion includes a T shaped arrangement, which has a torsional spring cross piece connected to the spring arm. A cap containing a conductive pad is hermetically sealed to the MEMS structure. When a predetermined acceleration is attained, the mass makes electrical contact with the conductive pad to close the G-switch.
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