Invention Grant
- Patent Title: Deformable mirror device with oscillating states for providing smaller controllable adjustment of light intensity
- Patent Title (中): 具有振荡状态的可变形镜装置，用于提供较小的光强可控调节
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Application No.: US12004641Application Date: 2007-12-24
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Publication No.: US07956319B2Publication Date: 2011-06-07
- Inventor: Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Kazuma Arai
- Applicant: Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Kazuma Arai
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: H01J3/14
- IPC: H01J3/14
Abstract:
A mirror device including: a mirror arranged on a substrate, supported by a hinge, and arranged substantially parallel to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state; and a drive circuit for applying a voltage to the plurality of address electrodes. The mirror device is controlled such that a voltage can be applied to a corresponding address electrode to deflect the mirror, and oscillation in the oscillating state can be started from a state of the deflected mirror.
Public/Granted literature
- US20080192212A1 Deformable mirror device with oscillating states Public/Granted day:2008-08-14
Information query
