Invention Grant
- Patent Title: Moving module of a wafer ion-implanting machine
- Patent Title (中): 晶圆离子注入机的移动模块
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Application No.: US12457929Application Date: 2009-06-25
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Publication No.: US07956333B2Publication Date: 2011-06-07
- Inventor: Ting-Wei Lin
- Applicant: Ting-Wei Lin
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW98106635A 20090302
- Main IPC: G21K5/10
- IPC: G21K5/10

Abstract:
A moving module of a wafer ion-implanting machine includes a wafer carrier, a moving shaft, a base, a pair of first magnets, a fixture body, and a plurality of second magnets. One end of the wafer carrier is pivotally connected to a wafer tray; and the other end is fixed onto one end of the moving shaft. The base is fixed to the other end of the moving shaft. The moving shaft drives the wafer carrier and the base to move lengthwise. The pair of first magnets is fixed to the base. The fixture body is located between the pair of first magnets. The second magnets are fixed onto the fixture body and one of them forms compelling magnetic force between one of the first magnets. Thereby, the friction generated by contacting any of the first magnets with the fixture body can be prevented, thus increasing the production yield.
Public/Granted literature
- US20100218720A1 Moving module of a wafer ion-implanting machine Public/Granted day:2010-09-02
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