Invention Grant
US07956389B2 Solid-state imaging device, imaging apparatus, and method of manufacturing solid-state imaging device 失效
固态成像装置,成像装置和制造固态成像装置的方法

Solid-state imaging device, imaging apparatus, and method of manufacturing solid-state imaging device
Abstract:
A solid-state imaging device includes: a semiconductor substrate; photoelectric conversion elements; vertical charge transfer paths that transfer charges generated in photoelectric conversion elements, in a vertical direction; a horizontal charge transfer path that transfers the charges transferred in vertical charge transfer paths, in a horizontal direction orthogonal to the vertical direction; a plurality of charge accumulating sections between the vertical charge transfer paths and the horizontal charge transfer path; a plurality of electrodes disposed above the respective charge accumulating sections, the plurality of electrodes being classified into a plurality of kinds of electrodes; wirings corresponding to the respective kinds of electrodes and extending in the horizontal direction above the plurality of electrodes; and a planarizing layer disposed between the wirings and an uneven surface caused by the plurality of electrodes that are present in areas overlapping the wirings, so as to planarize the uneven surface.
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