Invention Grant
- Patent Title: Solid-state imaging device, imaging apparatus, and method of manufacturing solid-state imaging device
- Patent Title (中): 固态成像装置,成像装置和制造固态成像装置的方法
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Application No.: US12234138Application Date: 2008-09-19
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Publication No.: US07956389B2Publication Date: 2011-06-07
- Inventor: Hirokazu Shiraki , Katsumi Ikeda
- Applicant: Hirokazu Shiraki , Katsumi Ikeda
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPP2007-245338 20070921
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L31/062 ; H01L31/113 ; H04N3/14 ; H04N5/335

Abstract:
A solid-state imaging device includes: a semiconductor substrate; photoelectric conversion elements; vertical charge transfer paths that transfer charges generated in photoelectric conversion elements, in a vertical direction; a horizontal charge transfer path that transfers the charges transferred in vertical charge transfer paths, in a horizontal direction orthogonal to the vertical direction; a plurality of charge accumulating sections between the vertical charge transfer paths and the horizontal charge transfer path; a plurality of electrodes disposed above the respective charge accumulating sections, the plurality of electrodes being classified into a plurality of kinds of electrodes; wirings corresponding to the respective kinds of electrodes and extending in the horizontal direction above the plurality of electrodes; and a planarizing layer disposed between the wirings and an uneven surface caused by the plurality of electrodes that are present in areas overlapping the wirings, so as to planarize the uneven surface.
Public/Granted literature
- US20090078969A1 SOLID-STATE IMAGING DEVICE, IMAGING APPARATUS, AND METHOD OF MANUFACTURING SOLID-STATE IMAGING DEVICE Public/Granted day:2009-03-26
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