Invention Grant
- Patent Title: Large grain size conductive structure for narrow interconnect openings
- Patent Title (中): 用于窄互连开口的大粒度导电结构
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Application No.: US12560878Application Date: 2009-09-16
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Publication No.: US07956463B2Publication Date: 2011-06-07
- Inventor: Chih-Chao Yang , Daniel C. Edelstein , Takeshi Nogami , Stephen M. Rossnagel
- Applicant: Chih-Chao Yang , Daniel C. Edelstein , Takeshi Nogami , Stephen M. Rossnagel
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
An interconnect structure having reduced electrical resistance and a method of forming such an interconnect structure are provided. The interconnect structure includes a dielectric material including at least one opening therein. The at least one opening is filled with an optional barrier diffusion layer, a grain growth promotion layer, an agglomerated plating seed layer, an optional second plating seed layer a conductive structure. The conductive structure which includes a metal-containing conductive material, typically Cu, has a bamboo microstructure and an average grain size of larger than 0.05 microns. In some embodiments, the conductive structure includes conductive grains that have a (111) crystal orientation.
Public/Granted literature
- US20110062587A1 LARGE GRAIN SIZE CONDUCTIVE STRUCTURE FOR NARROW INTERCONNECT OPENINGS Public/Granted day:2011-03-17
Information query
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