Invention Grant
- Patent Title: Optimization of the excitation frequency of a resonator
- Patent Title (中): 谐振器激发频率的优化
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Application No.: US12096382Application Date: 2006-12-05
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Publication No.: US07956543B2Publication Date: 2011-06-07
- Inventor: Andre Agneray , Clement Nouvel , Julien Couillaud
- Applicant: Andre Agneray , Clement Nouvel , Julien Couillaud
- Applicant Address: FR Boulogne
- Assignee: Renault s.a.s.
- Current Assignee: Renault s.a.s.
- Current Assignee Address: FR Boulogne
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0512769 20051215
- International Application: PCT/FR2006/051282 WO 20061205
- International Announcement: WO2007/071865 WO 20070628
- Main IPC: H05H1/24
- IPC: H05H1/24

Abstract:
A radio frequency plasma generator power supply, including: an interface that receives a request to determine an optimal control frequency; an output interface configured to be connected to a plasma generation resonator; a power supply module configured to apply a voltage at a set point frequency to the output interface, the voltage, depending on its frequency, selectively unable to allow generation of plasma of the resonator on receipt of a request during a phase optimizing power supply frequency of the generator and able to allow generation of plasma of the resonator during an operating phase; an interface that receives an electrical measurement of power supply of the resonator; a module that determines optimal control frequency, successively provides various set point frequencies to the power supply module on receipt of a request, and determines an optimal control frequency depending on electrical measurements received by the reception interface.
Public/Granted literature
- US20090309499A1 OPTIMIZATION OF THE EXCITATION FREQUENCY OF A RESONATOR Public/Granted day:2009-12-17
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