Invention Grant
- Patent Title: Apparatus for cooling
- Patent Title (中): 冷却装置
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Application No.: US11281901Application Date: 2005-11-18
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Publication No.: US07956982B2Publication Date: 2011-06-07
- Inventor: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten
- Applicant: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03B27/58 ; G03B27/62 ; H02K41/02

Abstract:
A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.
Public/Granted literature
- US20070114655A1 Apparatus for cooling Public/Granted day:2007-05-24
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