Invention Grant
US07956983B2 Exposure equipment having auxiliary photo mask and exposure method using the same
有权
具有辅助光罩的曝光设备和使用其的曝光方法
- Patent Title: Exposure equipment having auxiliary photo mask and exposure method using the same
- Patent Title (中): 具有辅助光罩的曝光设备和使用其的曝光方法
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Application No.: US11635045Application Date: 2006-12-07
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Publication No.: US07956983B2Publication Date: 2011-06-07
- Inventor: Dong-Seok Nam
- Applicant: Dong-Seok Nam
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0128892 20051223
- Main IPC: G03B27/44
- IPC: G03B27/44 ; G03B27/42 ; G03B27/54 ; G03B27/62 ; G03B27/32
Abstract:
Example embodiments of the present invention may provide exposure equipment having an auxiliary photo mask. The exposure equipment may include a light source and a first photo mask spaced apart from the light source by a desired distance. A second photo mask may include a third region and a fourth region. An exposure method using the exposure equipment also may be provided.
Public/Granted literature
- US20070148561A1 Exposure equipment having auxiliary photo mask and exposure method using the same Public/Granted day:2007-06-28
Information query
