Invention Grant
- Patent Title: Diffractive optical device, optical system using the diffractive optical device and method for manufacturing diffractive optical device
- Patent Title (中): 衍射光学器件,使用衍射光学器件的光学系统和衍射光学器件的制造方法
-
Application No.: US12279324Application Date: 2007-06-07
-
Publication No.: US07957063B2Publication Date: 2011-06-07
- Inventor: Satoshi Hayakawa
- Applicant: Satoshi Hayakawa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2006-167333 20060616
- International Application: PCT/JP2007/061950 WO 20070607
- International Announcement: WO2007/145263 WO 20071221
- Main IPC: G02B5/18
- IPC: G02B5/18

Abstract:
A diffractive optical device 1 is composed of resins of different materials, and has a laminated structure, in which a second diffractive device element 20 is bonded between a first diffractive device element 10 and a third diffractive device element 30; a first diffraction optical surface 6 is formed by adhering a diffraction grating groove 2, which is formed on the first diffractive device element 10, to a diffraction grating groove 3, which is formed on the second diffractive device element 20, on a bonding surface of the first diffractive device element 10 and the second diffractive device element 20, a second diffractive optical surface 7 is formed by adhering a diffraction grating groove 4, which is formed on the second diffractive device element 20, and a diffraction grating groove 5, which is formed on the third diffractive device element 30, on a bonding surface of the second diffractive device element 20 and the third diffractive device element 30, and both the non-bonded surface of the first diffractive device element 10 and the non-bonded surface of the third diffractive device element 30 are composed of planes.
Public/Granted literature
Information query