Invention Grant
US07957063B2 Diffractive optical device, optical system using the diffractive optical device and method for manufacturing diffractive optical device 有权
衍射光学器件,使用衍射光学器件的光学系统和衍射光学器件的制造方法

  • Patent Title: Diffractive optical device, optical system using the diffractive optical device and method for manufacturing diffractive optical device
  • Patent Title (中): 衍射光学器件,使用衍射光学器件的光学系统和衍射光学器件的制造方法
  • Application No.: US12279324
    Application Date: 2007-06-07
  • Publication No.: US07957063B2
    Publication Date: 2011-06-07
  • Inventor: Satoshi Hayakawa
  • Applicant: Satoshi Hayakawa
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Miles & Stockbridge P.C.
  • Priority: JP2006-167333 20060616
  • International Application: PCT/JP2007/061950 WO 20070607
  • International Announcement: WO2007/145263 WO 20071221
  • Main IPC: G02B5/18
  • IPC: G02B5/18
Diffractive optical device, optical system using the diffractive optical device and method for manufacturing diffractive optical device
Abstract:
A diffractive optical device 1 is composed of resins of different materials, and has a laminated structure, in which a second diffractive device element 20 is bonded between a first diffractive device element 10 and a third diffractive device element 30; a first diffraction optical surface 6 is formed by adhering a diffraction grating groove 2, which is formed on the first diffractive device element 10, to a diffraction grating groove 3, which is formed on the second diffractive device element 20, on a bonding surface of the first diffractive device element 10 and the second diffractive device element 20, a second diffractive optical surface 7 is formed by adhering a diffraction grating groove 4, which is formed on the second diffractive device element 20, and a diffraction grating groove 5, which is formed on the third diffractive device element 30, on a bonding surface of the second diffractive device element 20 and the third diffractive device element 30, and both the non-bonded surface of the first diffractive device element 10 and the non-bonded surface of the third diffractive device element 30 are composed of planes.
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