Invention Grant
- Patent Title: AFM probe with variable stiffness
- Patent Title (中): 具有可变刚度的AFM探头
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Application No.: US11962037Application Date: 2007-12-20
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Publication No.: US07958566B2Publication Date: 2011-06-07
- Inventor: Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
- Applicant: Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
- Applicant Address: KR Daejeon
- Assignee: Korea Institute of Machinery & Materials
- Current Assignee: Korea Institute of Machinery & Materials
- Current Assignee Address: KR Daejeon
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2007-0013567 20070209
- Main IPC: G01Q60/38
- IPC: G01Q60/38 ; G01Q60/40 ; G01Q10/00 ; G01Q20/00 ; G01Q80/00 ; G01N3/42

Abstract:
Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
Public/Granted literature
- US20080190182A1 AFM PROBE WITH VARIABLE STIFFNESS Public/Granted day:2008-08-14
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