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US07958906B2 Thermally induced single-use valves and method of use 有权
热诱导一次性阀门及使用方法

Thermally induced single-use valves and method of use
Abstract:
In accordance with an embodiment of the present invention, a thermally induced single-use valve is provided including a silicon wafer having a top surface and a bottom surface and at least one cavity formed in the bottom surface of the wafer, a thermally deformable membrane suspended across the cavity on the top surface of the wafer and at least one resistive element patterned on top of the thermally deformable membrane.
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