Invention Grant
- Patent Title: Flexible membrane assembly for a CMP system and method of using
- Patent Title (中): 用于CMP系统的柔性膜组件及其使用方法
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Application No.: US11969175Application Date: 2008-01-03
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Publication No.: US07959496B2Publication Date: 2011-06-14
- Inventor: Larry A. Spiegel
- Applicant: Larry A. Spiegel
- Applicant Address: US CA San Luis Obispo
- Assignee: Strasbaugh
- Current Assignee: Strasbaugh
- Current Assignee Address: US CA San Luis Obispo
- Agency: Crockett & Crockett, PC
- Agent K. David Crockett, Esq.
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B5/02 ; B24B5/35
Abstract:
A flexible membrane assembly for a wafer carrier in a CMP system. The flexible membrane assemble has a flat, flexible membrane joined to a rigid cylindrical sidewall.
Public/Granted literature
- US20090176445A1 Flexible Membrane Assembly for a CMP System Public/Granted day:2009-07-09
Information query
