Invention Grant
US07959994B2 Diptube apparatus and delivery method 有权
Diptube设备和送货方式

Diptube apparatus and delivery method
Abstract:
This invention relates to a vapor or liquid phase reagent dispensing apparatus having a diptube and also a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
Public/Granted literature
Information query
Patent Agency Ranking
0/0