Invention Grant
- Patent Title: Diptube apparatus and delivery method
- Patent Title (中): Diptube设备和送货方式
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Application No.: US12014282Application Date: 2008-01-15
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Publication No.: US07959994B2Publication Date: 2011-06-14
- Inventor: Ronald F. Spohn , David Walter Peters
- Applicant: Ronald F. Spohn , David Walter Peters
- Applicant Address: US CT Danbury
- Assignee: Praxair Technology, Inc.
- Current Assignee: Praxair Technology, Inc.
- Current Assignee Address: US CT Danbury
- Agent Iurie A. Schwartz
- Main IPC: B05B17/00
- IPC: B05B17/00 ; B29D23/00 ; B67D7/00

Abstract:
This invention relates to a vapor or liquid phase reagent dispensing apparatus having a diptube and also a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
Public/Granted literature
- US20080182023A1 DIPTUBE APPARATUS AND DELIVERY METHOD Public/Granted day:2008-07-31
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