Invention Grant
- Patent Title: Semiconductor structure and method of manufacturing same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US11831005Application Date: 2007-07-31
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Publication No.: US07960036B2Publication Date: 2011-06-14
- Inventor: Wai-Kin Li , Yi-Hsiung Lin , Gerald Matusiewicz
- Applicant: Wai-Kin Li , Yi-Hsiung Lin , Gerald Matusiewicz
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Jennifer R. Davis
- Main IPC: B32B9/00
- IPC: B32B9/00 ; B32B19/00 ; B32B15/04

Abstract:
A semiconductor structure and method of manufacturing the semiconductor structure, and more particularly to a semiconductor structure having reduced metal line resistance and a method of manufacturing the same in back end of line (BEOL) processes. The method includes forming a first trench extending to a lower metal layer Mx+1 and forming a second trench remote from the first trench. The method further includes filling the first trench and the second trench with conductive material. The conductive material in the second trench forms a vertical wiring line extending orthogonally and in electrical contact with an upper wiring layer and electrically isolated from lower metal layers including the lower metal layer Mx+1. The vertical wiring line decreases a resistance of a structure.
Public/Granted literature
- US20090035588A1 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING SAME Public/Granted day:2009-02-05
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