Invention Grant
- Patent Title: Reflective-type mask
- Patent Title (中): 反光型面膜
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Application No.: US12329126Application Date: 2008-12-05
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Publication No.: US07960076B2Publication Date: 2011-06-14
- Inventor: Takashi Kamo , Osamu Suga , Toshihiko Tanaka
- Applicant: Takashi Kamo , Osamu Suga , Toshihiko Tanaka
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Renesas Technology Corp.
- Current Assignee: Kabushiki Kaisha Toshiba,Renesas Technology Corp.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2007-317695 20071207
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A reflective-type mask having a main surface including a pattern region in the main surface, the pattern region including a multilayer reflective film which reflects the exposure light and a first absorber pattern on the multilayer reflective film, the first absorber pattern including a pattern which absorbs the exposure light and corresponds to a pattern to be formed on a wafer, a light shielding region in the main surface for preventing a region on the wafer excluding a predetermined region from being irradiated with the exposure light when the main surface is irradiated with the exposure light for transferring the first absorber pattern to the predetermined region, the light shielding region including a second absorber pattern having a lower reflectivity to the exposure light than the first absorber pattern and being provided in a position differing from a position in which the first absorber pattern is provided.
Public/Granted literature
- US20090148781A1 REFLECTIVE-TYPE MASK Public/Granted day:2009-06-11
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