Manufacturing method of semiconductor device

Invention Grant

US07960227B2 Manufacturing method of semiconductor device 有权

Title translation: 半导体器件的制造方法

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Patent Title: Manufacturing method of semiconductor device
Patent Title (中): 半导体器件的制造方法
Application No.: US12543179

Application Date: 2009-08-18
Publication No.: US07960227B2

Publication Date: 2011-06-14
Inventor: Yasuhiro Hayashi , Kazutoshi Izumi
Applicant: Yasuhiro Hayashi , Kazutoshi Izumi
Applicant Address: JP Yokohama
Assignee: Fujitsu Semiconductor Limited
Current Assignee: Fujitsu Semiconductor Limited
Current Assignee Address: JP Yokohama
Agency: Fujitsu Patent Center
Priority: JP2006-089312 20060328
Main IPC: H01L21/8242
IPC: H01L21/8242

Manufacturing method of semiconductor device

Abstract:

After a first via hole leading to a ferroelectric capacitor structure are formed in an interlayer insulating film by dry etching, a second via hole to expose part of the ferroelectric capacitor structure is formed in a hydrogen diffusion preventing film so as to be aligned with the first via hole by wet etching, and a via hole constructed by the first via hole and the second via hole communicating with each other is formed.

Abstract(Chinese):

在通过干蚀刻在层间绝缘膜中形成通向导电铁电电容器结构的第一通孔之后，在氢扩散防止膜中形成用于暴露部分铁电电容器结构的第二通孔，以便与第一通孔通过湿蚀刻形成通孔，并且形成由第一通孔和第二通孔构成的通孔，彼此连通。

Public/Granted literature

US20100261294A1 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE Public/Granted day:2010-10-14

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/82	....制造器件，例如每一个由许多元件组成的集成电路
H01L21/822	.....衬底是采用硅工艺的半导体的（H01L21/8258优先）
H01L21/8232	......场效应工艺
H01L21/8234	.......MIS工艺
H01L21/8239	........存储器结构
H01L21/8242	.........动态随机存取存储结构（DRAM）