Invention Grant
- Patent Title: Interlayer insulating film, method for forming the same and polymer compositon
- Patent Title (中): 层间绝缘膜，其形成方法和聚合物组合物
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Application No.: US11798218Application Date: 2007-05-11
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Publication No.: US07960489B2Publication Date: 2011-06-14
- Inventor: Nobuo Aoi
- Applicant: Nobuo Aoi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2002-229013 20020806
- Main IPC: C08F138/02
- IPC: C08F138/02 ; C08F238/02 ; C08F38/02
Abstract:
The interlayer insulating film of this invention is composed of a polymer in which a first monomer having four substituted acetylenyl groups and polymerizable in the three-dimensional direction and a second monomer having two substituted cyclopentanonyl groups and polymerizable in the two-dimensional direction are three-dimensionally polymerized.
Public/Granted literature
- US20070213488A1 Interlayer insulating film, method for forming the same and polymer compositon Public/Granted day:2007-09-13
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