Invention Grant
- Patent Title: Organometallic compounds and processes for preparation thereof
- Patent Title (中): 有机金属化合物及其制备方法
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Application No.: US12564990Application Date: 2009-09-23
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Publication No.: US07960565B2Publication Date: 2011-06-14
- Inventor: Scott Houston Meiere
- Applicant: Scott Houston Meiere
- Applicant Address: US CT Danbury
- Assignee: Praxair Technology, Inc.
- Current Assignee: Praxair Technology, Inc.
- Current Assignee Address: US CT Danbury
- Agent Iurie A. Schwartz
- Main IPC: C07F15/00
- IPC: C07F15/00

Abstract:
This invention relates to organometallic compounds represented by the formula LML′ wherein M is a metal or metalloid, L is a substituted or unsubstituted cyclopentadienyl group or cyclopentadienyl-like group, a substituted or unsubstituted pentadienyl group or pentadienyl-like group, or a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, and L′ is a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.
Public/Granted literature
- US20100028535A1 ORGANOMETALLIC COMPOUNDS AND PROCESSES FOR PREPARATION THEREOF Public/Granted day:2010-02-04
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