Invention Grant
US07960736B2 Glass-ceramic-based semiconductor-on-insulator structures and method for making the same 有权
玻璃陶瓷绝缘体上半导体结构及其制造方法

Glass-ceramic-based semiconductor-on-insulator structures and method for making the same
Abstract:
The present invention relates to a semiconductor-on-insulator structure including a semiconductor component comprised of substantially single-crystal semiconductor material layer and a single-crystal semiconductor material with an enhanced oxygen content layer; an oxide glass material layer; and a glass-ceramic layer.
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