Invention Grant
- Patent Title: Semiconductor device having a recess channel transistor
- Patent Title (中): 具有凹槽通道晶体管的半导体器件
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Application No.: US12615210Application Date: 2009-11-09
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Publication No.: US07960761B2Publication Date: 2011-06-14
- Inventor: Sung Woong Chung , Sang Don Lee
- Applicant: Sung Woong Chung , Sang Don Lee
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2006-0038825 20060428
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/94

Abstract:
The semiconductor device having a recess channel transistor includes a device isolation structure formed in a semiconductor substrate to define an active region having a recess region at a lower part of sidewalls thereof and a recess channel region formed in the semiconductor substrate under the active region. A method for fabricating the semiconductor device includes forming a device isolation structure in a semiconductor substrate to form an active region having a recess region at a lower part of sidewalls thereof, a gate insulating film formed over the semiconductor substrate including the recess channel region, and a gate electrode formed over the gate insulating film to fill up the recess channel region.
Public/Granted literature
- US20100117149A1 SEMICONDUCTOR DEVICE HAVING A RECESS CHANNEL TRANSISTOR Public/Granted day:2010-05-13
Information query
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