Invention Grant
- Patent Title: Memory devices including dielectric thin film and method of manufacturing the same
- Patent Title (中): 存储器件包括电介质薄膜及其制造方法
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Application No.: US11607500Application Date: 2006-12-01
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Publication No.: US07960774B2Publication Date: 2011-06-14
- Inventor: Sung-Yool Choi , Min Ki Ryu , Ansoon Kim , Chil Seong Ah , Han Young Yu
- Applicant: Sung-Yool Choi , Min Ki Ryu , Ansoon Kim , Chil Seong Ah , Han Young Yu
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Ladas & Parry LLP
- Priority: KR10-2005-0117717 20051205; KR10-2006-0044063 20060517
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
A memory device including a dielectric thin film having a plurality of dielectric layers and a method of manufacturing the same are provided. The memory device includes: a bottom electrode; at least one dielectric thin film disposed on the bottom electrode and having a plurality of dielectric layers with different charge trap densities from each other; and an top electrode disposed on the dielectric thin film. Therefore, a memory device, which can be readily manufactured by a simple process and can be highly integrated using its simple structure, can be provided.
Public/Granted literature
- US20070126045A1 Memory devices including dielectric thin film and method of manufacturing the same Public/Granted day:2007-06-07
Information query
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