Invention Grant
- Patent Title: Flash memory cell string
- Patent Title (中): 闪存单元格串
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Application No.: US12314163Application Date: 2008-12-05
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Publication No.: US07960778B2Publication Date: 2011-06-14
- Inventor: Jong-Ho Lee
- Applicant: Jong-Ho Lee
- Applicant Address: KR Seoul
- Assignee: SNU R&DB Foundation
- Current Assignee: SNU R&DB Foundation
- Current Assignee Address: KR Seoul
- Agency: The Nath Law Group
- Agent Jerald L. Meyer; Robert T. Burns
- Priority: KR10-2007-0126674 20071207
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
The present invention relates to a flash memory cell string. The flash memory cell string includes a plurality of cell devices and switching devices connected to ends of the cell devices. Each of the cell devices includes a semiconductor substrate, and a transmissive insulating layer, a charge storage node, a control insulating layer and a control electrode sequentially formed on the semiconductor substrate. In the flash memory cell string, a buried insulating layer is provided on the semiconductor substrate between the cell device and an adjacent cell device, thus enabling an inversion layer, which performs the functions of source/drain, to be easily formed.According to the present invention, the reduction characteristics and performance of the cell devices of NAND flash memory are improved, and the inversion layer of a channel is induced through fringing electric fields from the control electrode and the charge storage node if necessary.
Public/Granted literature
- US20090184362A1 Flash memory cell string Public/Granted day:2009-07-23
Information query
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