Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US12370641Application Date: 2009-02-13
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Publication No.: US07960793B2Publication Date: 2011-06-14
- Inventor: Tatsuo Shimizu , Masato Koyama
- Applicant: Tatsuo Shimizu , Masato Koyama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-031770 20080213
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
According to one embodiment, it is possible to provide a semiconductor device provided with an MIS transistor which has an effective work function being, as much as possible, suitable for low threshold operation. A CMIS device provided with an electrode having an optimal effective work function and enabling low threshold operation to achieve by producing an in-gap level by the addition of a high valence metal in an Hf (or Zr) oxide and changing a position of the in-gap level by nitrogen or fluorine or the like has been realized.
Public/Granted literature
- US20090200616A1 SEMICONDUCTOR DEVICE Public/Granted day:2009-08-13
Information query
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